Nanoscale Time Dependent Dielectric Breakdown (nanoTDDB)
NanoTDDB™ enables characterization of dielectric breakdown with nanoscale precision on Cypher AFMs. Constant or ramped biases up to ±150 V can be applied while monitoring current through a conductive AFM probe.
- The spatial resolution of the AFM tip enables local measurements of dielectric breakdown (~20 nm) on much smaller length scales than possible with conventional probe stations
- Precisely select measurement points from high-resolution images, or a grid of points can be mapped and analyzed