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圧電応答顕微鏡 (PFM, Piezoresponse force microscopy)は、エレクトロメカニカルな特性の評価に利用できる原子間力顕微鏡 (AFM) 技術であり、圧電体や強誘電体、特定の生体材料など、多くの材料システムの機能のベースとなります。AFMの探針を介して電気的な刺激をサンプルに対して局所的に印加した際、同時に機械的応答が1〜100pm/V程度のオーダーで測定されます。この技術は、材料科学の基礎研究と、豊富な応用技術フィールドの両分野で役立ちます。アサイラム・リサーチは高度な独自の測定テクニックと機能を多数導入することで、クロストークのない高感度のPFM測定環境を提供しており、製品PFM技術の世界的リーダーとして評価を受けています。
Cypher AFM用のレーザー干渉変位計測 (IDS) オプションを使用すると、d33測定の再現性が高まり、アーティファクトを取り除くことができます。IDSは、従来の光てこによるたわみ検出法 (OBD, optical beam detection) において利用されているカンチレバー角度の代わりに、カンチレバーのたわみを直接測定します。IDSは、静電相互作用によるアーティファクトを除去します。下記の技術資料(ダウンロードしてご覧いただけます)にて、IDSによりPFM測定がどのように改善されるかについて紹介しています。
AFMに関する技術的なお問い合わせ下のリストより技術資料(英文)のダウンロードをご利用いただけます。
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